Excimer laser accessories

Fluorine gas filter

Specification/Model: 70-54CFEF

Fluorine gas filter

Product Features

Interface: 1/4 ferrule straight-through

Usage direction: gas inlet at the bottom, gas outlet at the top

Warranty period: 10-12 months from opening


S model dimensions: φ100mm, height 225mm

Filtration effect: For a laser mixed gas containing 0.1% fluorine, after passing through one fluorine filter, the fluorine content is reduced to below 1 ppm (one part per million); when two filters are used in series, the fluorine content can be reduced to below 0.01 ppm.


L model dimensions: φ100mm, height 455mm

Filtration effect: For a laser mixed gas containing 0.1% fluorine, after passing through one fluorine filter, the fluorine content can be reduced to below 0.01 ppm.

Hardware specifications

Optional information

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