Premixed gas

193/248/308nm excimer laser premixed gas Specifications: 16L cylinder/2000L gas, 47L cylinder/6000L gas

Fluorine gas filter

Specification/Model: 70-54CFEF

Attenuator

Specification model: 12512-0411 1. Attenuation range 10%-90% 2. Software control (self-developed software) 3. Motorized/manual attenuation 4. Suitable for 193nm/248nm excimer lasers